| Title |
The Variation of the Characteristics of DLC Thin films by Pulsed Laser Deposition |
| Authors |
심경석(Sim, Gyeong-Seok) ; 이상렬(Lee, Sang-Ryeol) |
| Keywords |
Diamond like carbon(DLC) ; negative electron affinity ; pulsed laser deposition(PLD) |
| Abstract |
Diamond like carbon(DLC) thin films possesed not only marvelous material characteristics such as large thermal conductivity, high hardness and being chemically inert, but also possesed negative electron affinity (NEA) properties. The NEA is an extremely desirable property of the material used in microelestronics and vacuum microelestronics device. DLC films were fabricated by pulsed laser deposition(PLD). Theeffect of the laser energy density and the substrate temperature on the properies of DLC films was investigated. The experiment was accomplished at temperatures in the range of room temperature to 600°C. The laser energy density was in the range of 6 J/cm^2 to 16 J/cm^2 |