| Title |
A STUDY ON THE SPATIAL LIGHT MODULATOR WITH PISTON PLUS TILT MODE OPERATION USING SURFACE MICROMACHINING TECHNOLOGY |
| Authors |
정석환(Jeong, Seok-Hwan) ; 김용권(Kim, Yong-Gwon) |
| Keywords |
Adaptive optics ; SLM(spatial light modulator) ; mechanical coupling ; planarization ; PSD(position sensitive device) |
| Abstract |
In this paper, using surface micromachining technology with thick photoresist and aluminum, an SLM(Spatial Light Modulator), which is applied to the fields of adaptive optics and pattern recognition system, was fabricated and the electromechanical properties of the fabricated micro SLM are measured. In order to maximize fill-factor and remove mechanical coupling between micro SLM actuators, the micro SLM is composed of three aluminum layers so that spring structure and upper electrode are placed beneath the mirror plate, and 10×10 each mirror plate is individually actuated. Also, the micro SLM was designed to be able to modulate phase and amplitude of incoming light in order to have a continuity of phase modulation of incoming light. In the case of amplitude and phase modulation, maximum vertical displacement is 4μm, and maximum angular displacement is pm4.6^{ corc} respectively. The height difference of the fabricated mirror plate was able to be reduced to 1100A with mirror plate planarization method using negative photoresist(AZ5214). The electromechanical properties of the fabricated micro SLM were measured with the optical measurement system using He-Ne laser and PSD(position sensitive device). |