| Title |
Fabrication and Test of an Electromagnetic Micropump using Solenoid Coil |
| Authors |
김기훈(Kim, Gi-Hun) ; 김순영(Kim, Sun-Yeong) ; 정옥찬(Jeong, Ok-Chan) ; 양상식(Yang, Sang-Sik) |
| Keywords |
Electromagnetic actuator ; solenoid coil ; micropump ; silicone rubber ; flap valve |
| Abstract |
This paper presents the fabrication and test of a micropump with an electromagnetic actuator and a pair of aluminum flap valves. The actuator consists of a solenoid coil, a permanent magnet and an actuator diaphragm. The actuator diaphragm is fabricated by the spin coating of silicone rubber. The valve are passive ones and are fabricated by micromachining. The deflection of the fabricated actuator diaphragm is measured with a laser vibrometer. The deflection of the actuator diaphragm is proportional to the input current. The measured deflection of the fabricated diaphragm is 400 μm when the input is 118 mApp, and the cut-off frequency is 50 Hz. The maximum flow rate of the fabricated micropump with the electromagnetic actuator is about 50 μell/min at 5 Hz when the input current and the duty ratio of the square was are 118 mApp and 50%, respectively. |