| Title |
Xe Plasma Property with Flat Lamp by Langmuir Probe |
| Authors |
백광현(Pack Gwang-Hyeon) ; 이종찬(Lee Jong-Chan) ; 황명근(Hwang Myung-Keun) ; 최용성(Choi Yong-Sung) ; 박대희(Park Dae-Hee) |
| Keywords |
Plasma ; Electron Temperature ; Electron Density ; Flap Panel Lamp ; Langmuir Probe |
| Abstract |
The study on discharge of the flat lamp lighting source has been requested increasingly. To improve the brightness, life time and efficiency of flat lamp, the plasma diagnosis of flat lamp lighting source is very important. When a distance of discharge electrode is 5.5mm and width is 16.5mm, we measured electron temperature and electron density with single Langmuir probe in flat lamp. Pressure conditions to test the plasma discharge from 100 Torr to 300 Torr. The power supply was PDS-4000 with frequency 20kHz and duty ratio 20 %. Form these experimental results, electron temperature was decreased according to increase the gas pressure and the voltage while electron density was increased. |