| Title |
The Natural Cooling Effects of Pre-heated Substrate during RF Magnetron Sputter Deposition of ZnO |
| Authors |
박성현(Park, Sung-Hyun) ; 이능헌(Lee, Neung-Hun) |
| Keywords |
ZnO ; c-axis orientation ; RF magnetron sputter ; naturally cooling ; substrate temperature |
| Abstract |
Crystalline and micro-structural characteristics of ZnO thin films which were deposited on p-Si(100) with cooling naturally down of pre-heated substrate during RF magnetron sputter deposition, were investigated by XRD and SEM in this paper. The film which was prepared on the substrate which was pre-heated to 400°C before deposition and then cooled naturally down during deposition, showed the most outstanding c-axis preferred orientation. The ZnO thin film having the best crystalline result were applied to SMR type FBAR device and resonance properties of the device were investigated by network analyzer. It showed that resonance frequency was 2.05 GHz, return loss was -30.64 dB, quality factor was 3169 and electromechanical coupling factor was 0.4 %. This deposition method would be very useful for application of surface acoustic wave filter or film bulk acoustic wave resonator. |