| Title |
Fabrication of Nanoscale Metal Nanobeam Specimens and Evaluation of the Mechanical Properties of Gold Thin Film Nanostructures |
| Authors |
백창욱(Baek, Chang-Wook) ; 현익재(Hyeon, Ik-Jae) |
| Keywords |
NEMS ; mechanical properties ; freestanding specimens ; nanoindentation ; nanobeam bending method |
| Abstract |
In this paper, fabrication techniques for nanoscale metallic nanobeam specimens have been proposed, and mechanical properties of the fabricated gold nanobeams have been evaluated by nanoindentation techniques and nanobeam bending test. Elastic modulus and hardness of gold nanobeams were measured to be 109.6 pm 10 GPa and 1.73 pm 0.3 GPa, respectively, from the nanoindentation test, while elastic modulus was 241 pm 7 GPa from the nanobeam bending test. |