| Title |
Analysis of Time-Dependent Behavior of Plasma Sheath using Ion Fluid Model |
| Authors |
이호준(Lee, Ho-Jun) ; 이해준(Lee, Hae-June) |
| Keywords |
Sheath Dynamics ; Ion current ; Ion Energy ; Surface Charging |
| Abstract |
Dynamics of plasma sheath was analyzed using simple ion fluid model with poison equation. Incident ion current, energy, potential distribution and space charge density profile were calculated as a function of time. The effects of initial floating sheath on the evolution of biased sheath were compared with ideal matrix sheath. The effects of finite rising time of pulse bias voltage on the ion current and energy was studied. The influence of surface charging on the evolution of sheath was also investigated |