| Title |
The Power Rating Design of Inductively Coupled Plasma Light Source and The Electrical Dependency Between Parameters |
| Authors |
김현일(Kim, Hyun-Il) ; 박대희(Park, Dae-Hee) ; 장홍순(Chang, Hong-Soon) ; 백수현(Baek, Soo-Hyun) ; 임연찬(Yim, Youn-Chan) |
| Keywords |
Barkhausen criterion ; Rating power ; Inductively coupled plasma ; Impedance ; Design of ICP light source |
| Abstract |
We studied on the dependency of parameters which those were used to design a ballast of ICP light source. These parameters were derived from Barkhausen criterion equation about the oscillating condition of ballast. Comparing with a change of turns, we can suggest that a change of l is suitable to control a I_p of an ICP light source. According to the Z-l equation, we can find an optimum rating power of ICP light sources corresponding to l. |