| Title |
A Study on the Electrical Properties of Thin Film Type Humidity Sensor |
| Keywords |
TiO_2-V_2O_5 Thin Films ; Sol-Gel Method ; Capacitance of Thin Films ; Adsorption Time ; Desorption Time |
| Abstract |
[ TiO_2-V_2O_5 ] sol was fabricated using sol-gel method and TiO_2-V_2O_5 thin films were fabricated using dip-coating method. V_2O_5 sol was added 0.01mole, 0.03mole, 0.05mole into TiO_2 sol. As a results of crystalline properties, V_2O_5 peaks were not found in spite of V_2O_5 additive. Thickness of thin films increased 0.1~0.25μm every a dipping. Capacitance of thin films increased with increasing heat treatment temperature and it increased largest at 700°C. Capacitance of thin films decreased with increasing V_2O_5 additive and it increased largest at 0.01mole. Because adsorption time and desorption time of thin films was about 2 minutes 40 seconds and about 3 minutes 40 seconds respectively, adsorption time was faster about 1 minutes than desorption time. |