| Title |
Nano Visual Servoing Loop Using SEM Image |
| Authors |
최진호(Choi, Jin-Ho) ; 안상정(Ahn, Sang-Jung) ; 박병천(Park, Byong-Chon) ; 유준(Lyou, Joon) |
| Keywords |
AFM ; Nano Manipulator ; Edge Detection ; Visual Servoing ; CNT Tip |
| Abstract |
Nano manipulator is used to manufacture Carbon NanoTube(CNT) tips. Using nano manipulator, operator attaches a CNT at the apex of Atomic Force Microscope(AFM) tip, which requires a mastery of mechanics and long manufacture time. Nano manipulator is installed inside a Scanning Electron Microscope(SEM) chamber to observe the operation. This paper presents a control scheme for horizontal axes of nano manipulator via processing SEM image. Edges of AFM tip and CNT are first detected, and the position information so obtained is fed to control horizontal axes of nano manipulator. That is, a visual servoing loop is realized to control the axes more precisely in nano scale. |