| Title |
Design of Electromagnetically Driven Micro Scanning Mirror for Laser Animation System |
| Authors |
이경건(Lee, Kyoung-Gun) ; 장윤호(Jang, Yun-Ho) ; 유병욱(Yoo, Byung-Wook) ; 진주영(Jin, Joo-Young) ; 임용근(Lim, Yong-Geun) ; 김용권(Kim, Yong-Kweon) |
| Keywords |
Laser animation system ; Scanning mirror ; Serpentine spring ; Electromagnetic coil |
| Abstract |
In this paper, we present the design of an electromagnetic scanning mirror with torsional springs. The scanning mirror consisting of torsional springs and electromagnetic coils was designed for the applications of laser animation systems. We analyzed and optimized three types of torsional springs, namely, straight beam springs (SBS), classic serpentine springs (CSS), and rotated serpentine springs (RSS). The torsional springs were analyzed in terms of electrical resistance, fabrication error tolerance, and resonance mode separation of each type using analytical formula or numerical analysis. The RSS has advantages over the others as follows: 1) A low resistance of conductors, 2) wide resonance mode separation, 3) strong fabrication error tolerance, 4) a small footprint. The double-layer coils were chosen instead of single-layer coils with respect to electromagnetic forces. It resulted in lower power consumption. The geometry of the scanning mirror was optimized by calculations; RSS turn was 12 and the width of double-layer coil was 100μm, respectively. When the static rotational angle is 5 degrees, the power consumption of the mirror plate was calculated to be 9.35 mW since the resistance of the coil part and a current is 122{Ω} and 8.75 mA, respectively. The power consumption of full device including the mirror plate and torsional springs was calculated to be 9.63 mW. |