KIEE - The Transactions of the Korean Institute of Electrical Engineers

Mobile QR Code QR CODE : The Transactions of the Korean Institute of Electrical Engineers

QR CODE : The Transactions of the Korean Institute of Electrical Engineers

The Transactions of the Korean Institute of Electrical Engineers

The Transactions of the Korean Institute of Electrical Engineers

ISO Journal TitleTrans. Korean. Inst. Elect. Eng.

SCImago Journal & Country Rank

Main Menu

Journal Search

PDF INFO


Title	A Study on Metal Oxide based Humidity Sensor with Excellent Humidity Sensing Characteristics
Authors	유도현(You, Do-Hyun)
Page	pp.1982-1988
ISSN	1975-8359
Keywords	TiO_2 Films ; Silk Printing Method ; Microstructure ; Crystalline Structure ; Hysteresis Characteristics
Abstract	TiO_2 films are fabricated using silk printing method. Heat treatment temperature of films is 600[°C]. From the analysis of microstructure, grain size of TiO_2 films is about 0.2~0.3[μm]. Thickness of films is 30.19[μm] and surface uniformity of films is good. From the analysis of crystalline structure, TiO_2 films transform anatase phase to rutile phase. Capacitance of films increases according to increase relative humidity and decrease measuring frequency. Hysteresis characteristics of capacitance and impedance are best at 45[%RH] and 75[%RH] respectively. Impedance of films increases according to decrease measuring frequency.

© KIEE All right's reserved

This is an Open-Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/3.0/) which permits unrestricted non-commercial use, distribution and reproduction in any medium, provided the original work is property cited.