| Title |
Efficient Auto Measure Sampling Method for Semiconductor Line |
| Authors |
김태엽(Kim, Tae-Yeob) ; 선동석(Sun, Dong-Seok) ; 이지형(Lee, Jee-Hyung) |
| Keywords |
Sampling ; Auto Measure ; Tool/Process Change Point ; Capability ; OverLoad ; Statistical Model |
| Abstract |
Semiconductor processes need measurement to confirm where there are problems in quality after progresses manufacturing process. This paper suggests equipment and automatic measure sampling method that control monitoring ratio according to change point occurrence availability of process that is not measure method by the existent simple ratio rate. This paper defines measure section as ailment section, metastable section and stability section by change point standard and create statistical model of each section and developed suitable measure rate model by section. As a result, we have accomplished maximum throughput and minimum sampling number that needs to maintain constant level of quality. Proposed method minimizes load of measure process by brings production quality sophistication and decrease of process badness and lowers measure rate in stable section making perception about problem occurrence quick heightening measure rate at change point occurrence. |