| Title |
Characteristics on Boundary Layer and Formation Mechanism of c-BN Thin Films During Electron Assisted Hot Filament CVD Process |
| Authors |
최용(Choi, Yong) ; 최진일(Choe, Jean-I.) |
| DOI |
https://doi.org/10.5370/KIEE.2012.61.1.089 |
| Keywords |
Cubic boron nitride phase ; Electron assisted hot filament CVD ; Bias voltage |
| Abstract |
c-BN films were deposited on SKH-51 steels by electron assisted hot filament CVD method and microstructure development was studied processing parameters such as bias voltage, temperature, etching and phase transformation at boundary layer between BN compound and steel to develop a high performance wear resistance tools. A negative bias voltage higher than 200V at substrate temperature of 800°C and gas pressure of 20 torr in B2H6-NH3-H2 gas system was one of optimum conditions to produce c-BN films on the SKH-51 steels. Thin layer of hexagonal boron nitride phase was observed at the interface between c-BN layer and substrate. |