| Title |
The Electrical Characteristics of the Antistatic Wafer Carrier |
| Authors |
채종윤(Chea, Jong-Yun) ; 윤종국(Yoon, Jong-Kuk) ; 강옥구(Kang, Ok-Gu) ; 류봉조(Ryu, Bong-Jo) ; 구경완(Koo, Kyung-Wan) |
| DOI |
https://doi.org/10.5370/KIEE.2014.63.2.319 |
| Keywords |
Carbon nano tube ; Carbon black ; Polymer nano-composite ; Electric conductivity ; ESD : Electrostatic Discharge |
| Abstract |
The wafer carrier is made of PP, PC, PE resin which have excellent heat and chemical resistance and electrical properties. However, particle generation has become a problem due to static electricity generated in the carrier. Some conductive material such as carbon black (CB) and carbon fiber (CF) are added for the purpose of anti-static, however, additional for motility and particle contamination problems due to high carbon content occurs. In this paper, the electrical characteristics and workability are observed and compared by adding low Carbon Nono Tube(CNT) to each PP, PC and PE resin to solve the problem. |