| Title |
Analysis of DC Plasma using Electrostatic Probe and Fluid Simulation |
| Authors |
손의정(Son, Eui-Jeong) ; 김동현(Kim, Dong-Hyun) ; 이호준(Lee, Ho-Jun) |
| DOI |
https://doi.org/10.5370/KIEE.2014.63.10.1417 |
| Keywords |
DC plasma ; Electrostatic probe ; Fluid simulation |
| Abstract |
Using a parallel plate DC plasma system was prepared. Using this equipment, we investigated the basic discharge characteristics of DC argon plasma in terms of electron density, temperature, voltage and current waveforms and plasma potential. The effects of the electrode gap distance, input voltage, ballast resistance and pressure were measured using electrostatic probe. Plasma simulation using fluid approximation has been performed. External circuit effects was included in the simulation. Measured and calculated current voltage characteristics show similar tendencies. |