| Title |
The Characterization of Electrolytic Ion Water Generator by Electrode |
| Authors |
한병조(Han, Byung-Jo) ; 이연(Lee, Yeon) ; 류봉조(Ryu, Bong-Jo) ; 구경완(Koo, Kyung-Wan) |
| DOI |
https://doi.org/10.5370/KIEE.2016.65.10.1786 |
| Keywords |
Electrolytic ion water generator ; Mesh electrode ; Flow path electrode |
| Abstract |
The damage has occurred inside the semiconductor pattern When using conventional wet station for semiconductor. It was used for electrolytic ion water generator in order to prevent damage to the semiconductor pattern. It was designed and developed a flow path electrode and the mesh electrode to check the efficiency of the electrode. And It confirmed the expected results through the simulation of the flow path. and ORP were measured in accordance with the current and voltage of mesh electrode and flow paht electrodes. Flow path electrode 22A is 3V, up to pH 9.8, the value of ORP-558mV was measured and the mesh electrode was measured up to pH 9.8, ORP -350mV. |