| Title |
A Study on the Anti-Stiction Coating of Glass Lens Mold for Optical Communication |
| Authors |
정운조(Jeong, Woon-Jo) ; 조재철(Cho, Jae-Cheol) |
| DOI |
https://doi.org/10.5370/KIEE.2017.66.6.962 |
| Keywords |
DLC ; Anti-stiction ; Thin film ; Adhesion force ; Mold |
| Abstract |
The Diamond-Like-Carbon (DLC) coating is a new carbon-based amorphous material. Carbon ions in the plasma are electrically accelerated and collide with the substrate to form a thin film. This film has similar properties to diamonds such as high surface hardness, low coefficient of friction, corrosion resistance and durability that do not react with acids and bases. Also, since there is no thermal deformation, it can be printed at room temperature. and coated on almost all materials such as paper, polymer, ceramics and various metals even aspheric lens it is possible to mirror surface coating with excellent surface roughness. In this paper, we have analyzed the DLC film formed by Filtered Arc Ion Plating (Filtered AIP) process. |