| Title |
Risk Assessment of Explosion of Mixed Dust Generated in Semiconductor Manufacturing |
| Authors |
박창섭(Chang-Sup Park) ; 김찬오(Chan-O Kim) |
| DOI |
http://doi.org/10.5370/KIEE.2018.67.3.474 |
| Keywords |
Combustible dust ; Semiconductor manufacturing ; Dust collector ; Minimum explosion concentration ; Maximum explosion pressure ; Maximum explosion pressure rate |
| Abstract |
The use of metals such as aluminum and titanium and the related industrial facilities have been continuously increasing to meet the requirements of the improvement of high-tech products due to the development of industry, and explosion of metal dust. Semiconductor process Metal dust is essential, but research is insufficient. The purpose of this study is to identify risk by analyzing the quantitative risk such as maximum explosion pressure and minimum explosion concentration applied international test standard in order to select the semiconductor process facilities handling dust and to predict possible risk of accidents. |