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References

1 
V. I. Kolobov, R. R. Arslanbekov, D. Levko, V. A. Godyak, 2020, Plasma stratification in radio-frequency discharge in argon gas, J. Phys. D: Appl. Phys., Vol. 53, pp. 25LT01Google Search
2 
R. R. Arslanbekov, V. I. Kolobov, 2005, 2-D Simulation of Striation in Direct Current Glow Discharges in Argon, IEEE Trans. Plasma Sci., Vol. 22, pp. 354-355DOI
3 
Y. Fujiwara, H. Sakakita, H. Yamada, Y. Yamagishi, H. Itagaki, S. Kiyama, M. Fujiwara, Y. Ikehara, J. Kim, 2016, Observations of multiple stationary striation phenomena in an atmospheric pressure neon plasma jet, Jap. J. Appl. Phys., Vol. 55, pp. 010301Google Search
4 
R. Kumar, S. V. Kulkarni, D. Bora, 2007, Cylindrical Stationnary stiations in surface wave produced plasma columns of argon, Phys. Plasmas, Vol. 14, pp. 122101DOI
5 
C. H. Shon, J. K. Lee, 2001, Striation phenomenon in the plasma display panel, Phys. Plasmas, Vol. 8, pp. 1070DOI
6 
K. Bera, S. Rauf, J. Foster, K. Collins, 2021, Self- organized pattern formation in radio frequency capacitively coupled discharges, J. Appl. Phys., Vol. 129, pp. 050034DOI
7 
M. Y. Hur, J. S. Kim, I. C. Song, J. P. Verboncoeur, H. J. Lee, 2019, Model description of a two-dimensional electrostatic particle-in-cell simulation parallelized with a graphics processing unit for plasma discharges, Plasma Res. Express, Vol. 1, pp. 015016Google Search
8 
J. S. Kim, M. Y. Hur, C. H. Kim, H. J. Kim, H. J. Lee, 2018, Advanced PIC-MCC simulation for the investigation of step-ionization effect in intermediate-pressure capacitively coupled plasmas, J. Phys. D: Appl. Phys., Vol. 51, pp. 104004Google Search
9 
J. S. Kim, M. Y. Hur, H. J. Kim, H. J. Lee, 2019, The ion kinetics at the wafer edge by the variation of geometry and permittivity of the focus ring in capacitively coupled discharges, J. Appl. Phys., Vol. 126, pp. 233301DOI
10 
C. H. Kim, H. Kim, G. Park, H. J. Lee, 2021, The formation mechanism of nonuniformity from 2D nonlocal particle-dynamics in capacitive RF discharges, Plasma Sources Sci. Technol., Vol. 30, pp. 065031Google Search
11 
C. H. Kim, J. S. Kim, M. Y. Hur, Y. Sakiyama, H. J. Lee, 2021, Investigation of dual-frequency effect on the ion energy and flux in Torr-regime plasma by a two- dimensional GPU-PIC simulation, Plasma Sources Sci. Technol., Vol. 30, pp. 075005Google Search